Lund Nano Lab
Lund Nano Lab (LNL) is an open-access cleanroom nanofabrication facility, which provides state-of-the-art equipment and expertise in the fabrication and characterization of nanostructures used in basic and applied research.
Organizationally, LNL belongs to the Division of Solid State Physics of the Physics Department and is also a part of NanoLund – the center of nanoscience research at Lund University. The laboratory closely cooperates with other cleanroom facilities in Sweden within the Myfab network and with other major Scandinavian cleanrooms.
The expert staff of Lund Nano Lab provide knowledge and guidance in fabrication and analysis of structures at the nanometer scale. Some of the methods of fabrication include electron beam lithography (EBL), nanoimprint lithography (NIL), optical lithography, reactive ion etching (RIE), thermal evaporation, atomic layer deposition (ALD), magnetron sputtering and many more. Further, unique expertise in epitaxial methods of III-V semiconductor nanowire growth is also available.
More than 80 different tools, installed in class ISO 5 - 8 cleanroom areas are available to all lab users. The equipment include two high-resolution EBL tools, a nanoimprint unit, several mask aligners, a combined FIB/SEM, three RIE tools, deposition and sputtering equipment, annealing furnaces and many more. Characterization of nanostructures and devices can be performed by different tools, for example, three scanning electron microscopes (SEM), an atomic force microscope (AFM), ellipsometer, X-ray diffractometer, several optical microscopes and other inspection equipment. All equipment in the lab is accessible for lab users after appropriate hands-on training by the lab staff. The full list of equipment is available on LNL’s LIMS page.
Most of the LNL users are coming from academic research groups, mainly from Lund University and other Swedish universities. At the same time the laboratory is the main nanofabrication facility for several start-up companies.
Information about the lab fees and lab access is available upon request.
Insurance and safety
All LNL users must have insurance in order to use the lab. The LNL staff provides a dedicated introduction and safety course for all new users of the lab.
Head of Laboratory (lab access, prices)